Kazuya Masu
Tokyo Institute of Technology, Japan
Biography
Kazuya Masu obtained his BE, ME and PhD Degrees in Electronics Engineering from Tokyo Institute of Technology (Tokyo Tech), Japan. He was an Assistant Professor and an Associate Professor with Tohoku University from 1982. In 2000, he moved to Tokyo Tech. He is currently a Professor and Director General of Institute of Innovative Research at the same university. He was a Visiting Professor in Georgia Institute of Technology in 2002 and 2005 respectively. He received IEICE Electronics Society Award in 2004, IEICE Achievement Award in 2013 and IEEJ Outstanding Achievement Award in 2014. He served as Vice President of JSAP in 2014-2015. He is JSAP Fellow, IEEJ Fellow, and IEICE Fellow.
Abstract
Abstract : CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease