Kazuya Masu
Tokyo Institute of Technology, Japan
Title: CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease
Biography
Biography: Kazuya Masu
Abstract
This paper presents our recent progress of a high sensitivity complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS) accelerometer with gold proof-mass and its application in diagnosis of Parkinson’s disease. The feature of the CMOS-MEMS accelerometer is the use of gold proof-mass. High density of gold enables us to increase the sensitivity by reducing thermo-mechanical noise that is inversely proportional to the proof mass. We then show the developed CMOS-MEMS multi-physics design environment. An equivalent circuit of a MEMS accelerometer has been designed to simultaneously understand both the mechanical and the electrical behaviors. One of the potential applications of the high sensitivity accelerometer is also discussed by focusing on early-stage diagnosis of Parkinson’s disease.